Compact Series

Compact Series

A pioneer in the vacuum pump market. Focused on increasing tool up-time, the A 100 L does not require any on-site preventive maintenance

and features the highest reliability of its class, with a MTBF of more than 195 000 hours.

Applications

Load lock chamber and transfer chamber in semiconductor industry

Load lock and sputtering chamber in solar photovoltaic applications

Cryogenic applications and use in fundamental research laboratories

Industry (cryogenic, gas manufacturers, laser sources)

Analytical instrumentation (load lock chamber for electronic microscopy or surface analysis)

Customer value

High performance

Reliable - Energy Efficient

Compact - Stackable

Low vibration and noise level

Plug and play system: integrated monitoring

Optional RS232/RS485 interface

Product description

The reference in the integrated dry pump market

High pumping speed 100 m3/h

Product

A 100 L Standard version

A 100 L ES Energy Saving version